Designing Heating Zones in a Semiconductor Heater for Better Thermal Balance

https://thermal-design-insights.brightpathdigest.com/posts/how-to-improve-heat-distribution-with-a-silicone-heater

In etch equipment, a semiconductor heater must deliver heat in a controlled way. It uses a resistive heating element integrated with an electrically insulating structure. One useful trait is repeatable heat delivery